Optical Mems for Chemical Analysis and Biomedicine

Optical MEMS, or MOEMS, are MEMS (micro-electromechanical systems) merged with micro-optics. They allow sensing or manipulating optical signals on a very small size scale, using integrated mechanical, optical, and electrical systems, and encompass a wide variety of devices including optical switch, optical cross-connect, tunable VCSEL, and microbolometers, among others. They give the potential of new kinds of sensors and actuators in microsystems and hold great promise specifically in biomedical applications. This book describes the current state of Optical MEMS in chemical and biomedical analysis. With contributions from an international panel of leading experts, it brings together current trends and highlights topics representing the most exciting progress in recent years in the field.

Topics covered include: manufacturing technology for MOEMS; electrowetting based microoptics; MEMS-based optical scanners and their endoscopic imaging applications; photothermal microfluidics; optofluidic imaging; tuning nanophotonic cavities with nanoelectromechanical systems; biologically inspired micro-optics for biophotonic applications; microcameras; and nanostructured aluminum oxide-based optical biosensing and imaging.

Optical MEMS for Chemical Analysis and Biomedicine will be essential reading for researchers and professionals working on developing, manufacturing or applying MOEMS. It will also be invaluable to advanced graduates in the field.