Molecular Flow Complex Vaccum Systems

This book provides comprehensive coverage of the basic theory, calculation methods and optimization of high and ultra-high vacuum systems and equipment. After an explication of molecular kinetic theory as applied to the problems of vacuum technology, the book examines methods (including the Monte Carlo method) of analyzing molecular flow in nonequilibrium systems. It goes on to describe the parameters for separate vacuum system components, and ends with a section on molecular flow in structures with absorbing walls.