Computational Modeling in Semiconductor Processing
- Criticism of the Works of Novelists, Poets, Playwrights, Short-Story Writers, and Other Creative Writers Who Liv
Forfatter: info mangler
- Format
- Bog, hardback
- Engelsk
- 363 sider
- Indgår i serie
Normalpris
kr. 544,95
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kr. 494,95
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Beskrivelse
This text provides coverage of the models, governing equations and numerical techniques suitable for process simulation. It concentrates on such areas as chemical vapour deposition, metal-organic chemical vapour deposition, plasma processing, rapid thermal processing and crystal growth, as well as defining the basic principles of transport phenomena, gas phase and surface reactions in electronics materials processing. In addition, it explains how to apply practical numerical techniques used in process simulation, and presents the numerical methods necessary to produce simulation codes.
Detaljer
- SprogEngelsk
- Sidetal363
- Udgivelsesdato01-01-1995
- ISBN139780890067079
- Forlag Artech House Publishers
- FormatHardback
- Udgave0
Størrelse og vægt
10 cm
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- Computational Modeling in Semiconductor Processing